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2. 琛ㄩ潰骞虫暣搴︼紙Planarization锛夛細CMP鑸囬崓閵呯殑“瀛跨敓”闂�(gu膩n)绯�
娣峰悎閸靛悎瑕佹眰閸靛悎闈㈢殑琛ㄩ潰绮楃硻搴︼紙Ra锛夋サ浣庛�傞浕閸嶅悗鐨勯妳琛ㄩ潰閫氬父鍛�“铇戣弴闋�”鐙�鍑歌捣锛屽繀闋堥�氶亷CMP锛堝寲瀛告姊版媼鍏夛級灏囧叾纾ㄥ钩銆�
鍗�(xi茅)鍚屾晥鎳�(y墨ng)锛�“闊滃畾寰�”灏嶅钩鏁村害鐨勬サ鑷磋拷姹�锛屽皣甯跺嫊閸嶉妳瑷�(sh猫)鍌欒垏CMP瑷�(sh猫)鍌欑殑缍佸畾閵峰敭銆傞浕閸嶅伐钘濈殑鍧囧嫽鎬х洿鎺ユ焙瀹氫簡CMP鐨勫幓闄ら噺鍜屽伐浣滈噺锛屽叐鑰呭繀闋堝崝(xi茅)鍚屽劒(y艒u)鍖栥�傝ō(sh猫)鍌欏粻鍟嗚嫢鑳芥彁渚�“閸嶉妳+CMP”鐨勪竴楂斿寲瑙ｆ焙鏂规锛屽皣鍦ㄧ鐖腑鍗犳摎(j霉)绲曞皪鍎�(y艒u)鍕�銆�
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